CHONGQING TIANHE--FILTER ENGINEER EXPERT
Product Detail
Hall Ion Source
Hall Ion Source 
Detail

Ion source diameter: Ф100mm

Ion energy adjustable range: 0~800eV

Recommended standard ion energy range: 0eV~600eV

Maximum ion current density: ≤1mA/cm2

Effective beam diameter:≥70mm

Ion energy: 0eV~1200eV

Ion beam: 0mA~100mA

Ion source beam diameter: Ф90mm

Ion beam bombardment range diameter:≤40mm

Ion energy usage range: 0eV~1200eV

Ion beam flow range: 0mA~100mA



Used for optical coating.